| Sunday, August 13 |
| 2:00 - 11:00 p.m. | Arrival and Registration |
| 6:00 p.m. | Dinner |
| 7:30-9:30 | Fluorocarbon plasma chemistry |
| Discussion Leader: G. Hills (Gasonics International) |
| 7:30-8:15 | J. Cecchi (U. New Mexico), Time evolution of fluorocarbon radical concentrations during pulsed oxide etching plasmas in an ICP reactor |
| 8:15-8:30 | Discussion |
| 8:30-9:15 | J.P. Booth (U. Joseph Fourier, Grenoble), Polymerisation mechanisms in fluorocarbon ICP discharges |
| 9:15-9:30 | Discussion
|
Monday, August 14 |
| 7:30-8:30 | Breakfast |
| 8:30 | Conference Photo |
| 9:00-12:30 | Materials synthesis |
| Discussion Leader: K. Hassouni (LIMHP-CNRS) |
| 9:00-9:45 | S. Veprek (Tech. Univ. Munich), Plasma processing of novel super- and ultrahard nanocomposites |
| 9:45-10:00 | Discussion |
| 10:00-10:30 | Break |
| 10:30-11:15 | S. Chandra (U. Toronto), Formation of splats in plasma spray coating: experiments and modelling |
| 11:15-11:30 | Discussion |
| 11:30-12:15 | H. Koinuma (Tokyo Inst. Tech.), Combinatorial approach to plasma chemical processes |
| 12:15-12:30 | Discussion |
| 12:30-1:30 | Lunch |
| 1:30-6:00 | Free |
| 6:00 p.m. | Dinner |
| 7:30-9:30 p.m. | Poster session I |
Tuesday, August 15 |
| 7:30-8:30 | Breakfast |
| 9:00-12:30 | Plasma-surface treatments and radical interactions |
| Discussion leader: E. Aydil (Univ. California Santa Barbara) |
| 9:00-9:45 | J. Dai (CSIRO, Australia), Plasma processing of textiles -
mechanism and industrial applications |
| 9:45-10:00 | Discussion |
| 10:00-10:30 | Break |
| 10:30-11:15 | J. Grace (Kodak), Plasma processing of polyester surfaces with low-frequency RF discharges |
| 11:15-11:30 | Discussion |
| 11:30-12:15 | A. von Keudell (Max Plank Inst. Plasma Physics), Radical surface interactions of hydrocarbon radicals |
| 12:15-12:30 | Discussion |
| 12:30-1:30 | Lunch |
| 1:30-6:00 | Free |
| 6:00 p.m. | Dinner |
| 7:30-9:30 | Atmospheric pressure glow discharges and applications |
| Discussion leader: S. Girshick (Univ. of Minnesota) |
| 7:30-8:15 | K. Terashima (Univ. of Tokyo), Production of micrometer-scale plasma and its application to materials science |
| 8:15-8:30 | Discussion |
| 8:30-9:15 | C. Laux (Stanford Univ.), Glow discharges in atmospheric pressure air |
| 9:15-9:30 | Discussion |
Wednesday, August 16 |
| 7:30-8:30 | Breakfast |
| 8:30-12:00 | Environmental and analytical applications of plasma processing |
| Discussion leader: J. Mostaghimi (Univ. of Toronto) |
| 8:30-9:15 | S. Raoux (Applied Materials), Environmental engineering using remote plasmas |
| 9:15-9:30 | Discussion |
| 9:30-10:00 | Break |
| 10:00-10:45 | M. Moisan (Univ. of Montreal), Microwave plasma treatment of PFCs |
| 10:45-11:00 | Discussion |
| 11:00-11:45 | A. Montaser (George Washington Univ.), Direct injection of solution into plasmas for chemical analysis: The hierarchy of hotness |
| 11:45-12:00 | Discussion |
| 12:00-12:30 | Business Meeting |
| 12:30-1:30 | Lunch |
| 1:30-4:30 | Free |
| 4:30-6:00 | Poster session II |
| 6:00 p.m. | Dinner |
| 7:30-9:30 | Plasma diagnostics |
| Discussion leader: R. van den Sanden (Eindhoven Univ.) |
| 7:30-8:15 | V. Donnelly (Lucent Bell Labs), Measurement of charged and neutral species densities and energies in an inductively-coupled chlorine plasma |
| 8:15-8:30 | Discussion |
| 8:30-9:15 | M. Blain (Sandia National Labs), Design, fabrication, and operation of a high-resolution submicron retarding field energy analyzer for process plasma analysis |
| 9:15-9:30 | Discussion |
Thursday, August 17 |
| 7:30-8:30 | Breakfast |
| 9:00-12:30 | Plasma modeling, diagnostics and fundamental processes |
| Discussion leader: M. Kushner (Univ. of Illinois) |
| 9:00-9:45 | U. Kortshagen (Univ. of Minnesota), Electron kinetics in low-pressure discharges |
| 9:45-10:00 | Discussion |
| 10:00-10:30 | Break |
| 10:30-11:15 | K. Hassouni (LIMHP-CNRS), Different aspects in the modeling of moderate pressure H2 and H2/CH4 microwave plasmas used for diamond deposition |
| 11:15-11:30 | Discussion |
| 11:30-12:15 | E. Fisher (Colorado State Univ.), What do radical-surface interactions really tell us about plasma processing? |
| 12:15-12:30 | Discussion |
| 12:30-1:30 | Lunch |
| 1:30-6:00 | Free |
| 6:00 p.m. | Banquet |
| 7:30-9:30 | Novel applications of plasma processing |
| Discussion leader: G. Kroesen (Eindhoven Univ.) |
| 7:30-8:15 | D. Cohn (MIT), Plasmatron fuel converters for environmentally improved vehicles |
| 8:15-8:30 | Discussion |
| 8:30-9:30 | Future of Plasma Processing Science |
Friday, August 18 |
| 7:30-8:30 | Breakfast |
| 9:00 | Bus departs for Logan Airport |
